Improvement of GHz Range Electromagnetic Properties of Ferrite Thin Film Magnetic Core Integrated RF Inductor
نویسندگان
چکیده
Ferrite thin film magnetic core integrated radio frequency inductors (RFIs) were investigated in order to realize RFIs with a smaller size, higher driving frequency, and quality factor (Q). The ferrite films fabricated by low-temperature spin-spray deposition assuming adaptation the photolithography process for inductor fabrication two different compositions: Ni0.16Zn0.20Fe2.64O4+δ (NZFO) Co0.11Fe2.89O4+δ (CFO). RFI CFO had 34% inductance 43% Q improvement compared air at of 1 GHz. It was confirmed that complex permeability correlated characteristics films. results suggest integrating is effective future mobile device applications.
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ژورنال
عنوان ژورنال: Journal of the Magnetics Society of Japan
سال: 2023
ISSN: ['1882-2932', '2432-0250', '1882-2924']
DOI: https://doi.org/10.3379/msjmag.2303r002